$examples of diffraction grating$

Examples of Diffraction Grating Metrology

The importance of high-quality efficiency data in diffraction grating metrology cannot be overstated. In particular, flight gratings and X-ray gratings characterized by synchrotron radiation sources have been extensively studied due to the availability of detailed groove profiles and random nanoroughness measurements using atomic force microscopy (AFM) or scanning tunneling microscopy (STM).

The author has demonstrated examples of AFM and STM data for bulk, coated, and multilayer-coated ruled, holographic, laser-lithographic, and electron-lithographic gratings featuring realistic groove profiles. These studies have provided valuable insights into the tip deconvolution, geometry, and radius groove shapes, as well as abrupt groove slopes and roughness PSD functions.

However, despite the widespread use of AFM and STM methods in surface relief grating metrology, a comprehensive review of their application has not been undertaken until now. In this chapter, we will present both earlier published results and recent unpublished findings to provide a complete picture of the state-of-the-art in diffraction grating metrology.

Recent studies have focused on the use of AFM and STM for groove profile measurements on surface relief diffraction gratings. These techniques have been employed to measure the groove profiles of holographic relief gratings, as shown in Figure 1(a) and (b), which were obtained using organic and non-organic photoresists.

$examples of diffraction grating$

The results presented here demonstrate the capabilities of AFM and STM for measuring the groove profiles of various surface relief diffraction gratings. These techniques have been widely used in metrology for many years, with significant advances made since their introduction in 1986 when they were awarded the Nobel Prize in Physics.

In conclusion, this chapter provides a comprehensive overview of the application of AFM and STM methods in diffraction grating metrology, highlighting the importance of high-quality efficiency data and the capabilities of these techniques for measuring groove profiles.

$examples of diffraction grating$

Examples of diffraction grating